Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent
1994-10-31
1996-10-29
Padgett, Marianne
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
427535, 427579, 4272553, H05H 100, H05H 124, C23C 1600
Patent
active
055694993
ABSTRACT:
A method for reforming an insulating film such as a BSG film formed by a CVD technique. The method reduces the parasitic capacitance between conductor layers having an intervening film, especially a BSG film, and includes the steps of depositing a BSG film on a substrate from a gaseous source and exposing the BSG film to a reforming gas plasma.
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Maeda Kazuo
Tokumasu Noboru
Yuyama Yoshiaki
Alcan-Tech Co., Inc.
Canon Sales Co., Inc.
Padgett Marianne
Semiconductor Process Laboratory Co. Ltd.
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