Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-05-02
2006-05-02
Nguyen, Kiet T (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S492200
Reexamination Certificate
active
07038204
ABSTRACT:
An electric field is applied below a resist to reduce proximity effects associated with electron beam scattering, thereby improving the resolution of features or lines written into the resist. Although the electrons in the electron beam can be very energetic (e.g., >>10 keV), it is shown that even a small electric field can reduce the number of electrons that re-enter the resist material after being scattered in the substrate, and thus reduce the energy deposited in the resist from these electrons. One advantage of this technique is that high potentials and high fields are not required. Accordingly, the methods described can be applied to existing tooling with little modification to the electron beam system.
REFERENCES:
patent: 4323638 (1982-04-01), Adams et al.
patent: 4350866 (1982-09-01), Zasio et al.
patent: 5112724 (1992-05-01), Bradshaw
patent: 6482558 (2002-11-01), Singh et al.
patent: 6512237 (2003-01-01), Nakasugi et al.
patent: 2002/0177083 (2002-11-01), Dobisz et al.
patent: 2003/0146382 (2003-08-01), Suzuki et al.
patent: 2003/0203311 (2003-10-01), Dobisz et al.
patent: 1604004 (1981-12-01), None
patent: 55140229 (1980-11-01), None
patent: 57207338 (1982-12-01), None
patent: 58140120 (1983-08-01), None
patent: 61206223 (1986-09-01), None
patent: 61208830 (1986-09-01), None
patent: 1025416 (1989-01-01), None
patent: 1091422 (1989-04-01), None
patent: 01-283825 (1989-11-01), None
patent: 2192714 (1990-07-01), None
patent: 8029967 (1996-02-01), None
Z.-J. Ding et al., “A Monte Carlo Modeling of Electron Interaction with Solids Including Cascade Secondary Electron Production”, Scanning, vol. 18, 1996, pp. 92-113.
R. Shimizu et al., “Monte Carlo modelling of electron-solid interactions”, Rep. Prog. Phys., 1992, pp. 487-531.
R. J. Hawryluk et al., “Energy dissipation in a thin polymer film by electron beam scattering*”, Journal of Applied Physics, vol. 45, No. 6, Jun. 1974, pp. 2551-2566.
C. R. K. Marrian et al., “Modelling of electron elastic and inelastic scattering”, Journal Vac. Science Technology B., vol. 14, No. 6, Nov./Dec. 1996, pp. 3864-3869.
Marrian Christie Roderick Kingsley
Rettner Charles Thomas
International Business Machines - Corporation
Johnson Daniel E.
Nguyen Kiet T
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