Method for real-time in-line testing of semiconductor wafers

Details Method for real-time in-line testing of semiconductor wafers Method for real-time in-line testing of semiconductor wafers

1997-05-08

2000-05-30

Dutton, Brian

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

G01R 3126, H01L 2166

Patent

active

060690178

ABSTRACT:
An apparatus and method for the real-time, in-line testing of semiconductor wafers during the manufacturing process. In one embodiment the apparatus includes a probe assembly within a semiconductor wafer processing line. As each wafer passes adjacent the probe assembly, a source of modulated light, within the probe assembly, having a predetermined wavelength and frequency of modulation, impinges upon the wafer. A sensor in the probe assembly measures the surface photovoltage induced by the modulated light. A computer then uses the induced surface photovoltage to determine various electrical characteristics of the wafer.

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