Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
Patent
1998-09-03
1999-11-16
Pianalto, Bernard
Coating processes
Direct application of electrical, magnetic, wave, or...
Polymerization of coating utilizing direct application of...
427 58, 4272481, 4272556, 427535, 427569, 427585, 437225, C08F 246
Patent
active
059853751
ABSTRACT:
A novel method for pulsed-plasma enhanced chemical vapor deposition ("PPECVD") is described. A power-modulated energy waveform is provided to a gas in a reactor chamber to generate a pulsed-plasma for PPECVD. The power-modulated energy waveform is amplitude-modulated by a beat frequency caused by interfering signals. The product of the interfering signals is a continuous, amplitude modulated signal, in which a beat frequency waveform may have either a sinusoidal form or a non-sinusoidal form. Beat frequency is selected such that a characteristic thickness of a material to be deposited may or may not be not be deposited in a single period of the beat frequency.
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Donohoe Kevin G.
Sandhu Gurtej S.
Micro)n Technology, Inc.
Pianalto Bernard
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