4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Kevin G. Donohoe

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Apparatus and method for improving uniformity in batch processin

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Apparatus and method for improving uniformity in batch...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Apparatus for controlling the temperature of a gas...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Apparatus for controlling the temperature of a gas...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Apparatus for improved low pressure inductively coupled high...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-207074

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