Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Patent
1994-05-25
1995-10-31
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having pulling during growth
117 19, 117 20, 117217, C30B 1520
Patent
active
054620112
ABSTRACT:
A method and apparatus for pulling single crystals from a melt of semicontor material, in which a monocrystalline seed crystal grows to form a single crystal, the seed crystal being dipped into the melt and raised in a controlled manner in the vertical direction with respect to the melt, while the melt forms a molten pool which is held on a support body only by the surface tension and by electromagnetic forces due to an induction coil. This method includes recharging the melt with semiconductor material in solid or liquid form during the growth of the single crystal.
REFERENCES:
patent: 2961305 (1960-11-01), Dash
patent: 3607139 (1971-09-01), Hanks
patent: 3936346 (1976-02-01), Lloyd
patent: 4366024 (1982-12-01), Ast et al.
patent: 4659421 (1987-04-01), Jewett
patent: 5030315 (1991-07-01), Washizuka et al.
Hensel Wolfgang
Tomzig Erich
Wolf Reinhard
Garrett Felisa
Kunemund Robert
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
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