Method for providing distributed material management and...

Details Method for providing distributed material management and... Method for providing distributed material management and...

2005-01-18

2005-01-18

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S099000, C700S100000, C700S213000, C414S940000

Reexamination Certificate

active

06845294

ABSTRACT:
A method for providing distributed material management and flow control in an integrated circuit (IC) factory. The IC factory comprises a factory stocker, a plurality of process bays and a factory transport agent for moving wafer cassettes between the bay and the stocker. Each of the bays comprises a bay stocker, a plurality of tools, a mini-stocker and a bay transport agent for moving wafers amongst the bay components. The apparatus uses partitioned stockers to facilitate deadlock avoidance or deadlock resolution. Additionally, various algorithms are used to detect wafer cassette movement situations where deadlocks may result from a wafer cassette movement within a bay and for resolving deadlocks when they occur.

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Copy of Communication Relating to the Results of the Partial International Search for corresponding PCT/US02/19856, dated Nov. 6, 2003.

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