Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2006-02-28
2006-02-28
Garbowski, Leigh M. (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000
Reexamination Certificate
active
07007259
ABSTRACT:
A method and system is disclosed for inserting dummy metal into a circuit design, which includes a plurality of objects and clock nets. Aspects of the invention include identifying free spaces on each layer of the chip design suitable for dummy metal insertion, wherein the free spaces are referred to as dummy regions. Thereafter, the dummy regions are prioritized such that the dummy regions located adjacent to clock nets are filled with dummy metal last. In a preferred embodiment, the dummy regions are further prioritized such that the dummy regions adjacent to wider clock nets are filled with dummy metal after dummy regions that are located adjacent to narrower clock nets.
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Liu, George Y. et al., “Chip-Level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films,” CMP-MIC Conference, Feb. 11-12, 1999, pp. 120-127.
Raman Santhanakrishnan
Shrowty Vikram
Garbowski Leigh M.
LSI Logic Corporation
Sawyer Law Group LLP
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