Method for providing an anti-stiction coating on a metal...

Details Method for providing an anti-stiction coating on a metal... Method for providing an anti-stiction coating on a metal...

2006-09-25

2009-11-17

Meeks, Timothy H (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

Base includes an inorganic compound containing silicon or...

C427S248100

Reexamination Certificate

active

07618682

ABSTRACT:
A method for providing an anti-stiction coating on a metal surface includes reacting a vapor of perfluorooctylhydroxamic acid with the metal surface in a reaction chamber.

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Folkers, et al., “Self-Assembled Monolayers of Long-Chain Hydroxamic Acids on the Native Oxides of Metals”, Langmuir, vol. 11, No. 3, 1995, pp. 813-824.

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