Method for protecting a probe tip using active lateral scanning

Details Method for protecting a probe tip using active lateral scanning Method for protecting a probe tip using active lateral scanning

1997-05-21

1998-09-01

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

058013814

ABSTRACT:
A scanning probe microscope includes a detection mechanism producing a feedback signal indicating a condition of engagement between the scanning probe and the surface of a sample being examined. When this engagement is above a threshold level, the lateral scanning movement between the probe and sample is stopped. The scanning movement occurs in incremental movements, and a feedback signal above the threshold level indicates that, if the scanning movement were to continue, the probe could not be moved upward fast enough to prevent a crash condition between the probe and the sample surface. The scanning movement is not re-started until the feedback signal indicates that the probe has been moved far enough away from the sample surface that such a crash condition can be avoided during the next incremental movement.

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