Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1987-06-03
1988-10-18
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156653, 156656, 156657, 1566591, 1566611, 156662, 156667, 350332, 357 4, 357 237, 437 58, 437181, 437228, H01L 21306, B44C 122, C03C 1500, C23F 102
Patent
active
047785608
ABSTRACT:
A method of production of active matrix display substrates using thin film transistors and more particularly to a method for production of substrates for liquid-crystal display use. The active matrix substrate using the thin film transistor is produced by the mask processes of smaller number. The process of the present invention can reduce the number of the masks, by one, of the active matrix substrate using the inverted staggered thin film transistor which requires the masks from five levels to six levels. Further improvements reduce the number of the masks to four levels from three levels, thus contributing greatly towards lower cost, improved yield.
REFERENCES:
patent: 4514253 (1985-04-01), Minezaki
patent: 4624737 (1986-11-01), Shimbo
patent: 4654117 (1987-03-01), Aoki et al.
Kawaguchi Takao
Nagata Seiichi
Nanno Yutaka
Okawa Noriko
Takeda Etsuya
Matsushita Electric - Industrial Co., Ltd.
Powell William A.
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