Method for production of a moisture sensor

Details Method for production of a moisture sensor Method for production of a moisture sensor

1984-04-27

1985-05-07

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

73 73, 156646, 156655, 1566591, 156668, 156902, 204192E, 236 44R, B44C 122, C03C 1500, C03C 2506, B29C 1708

Patent

active

045156530

ABSTRACT:
A method for production of a moisture sensor comprising forming a moisture sensitive polymer film on a substrate, disposing a patterned masking material on said moisture sensitive polymer film, and etching said moisture sensitive film by means of an oxygen plasma, whereby a desired fine pattern of the moisture sensitive film is formed with fair accuracy and reproducibility.

REFERENCES:
patent: 4357369 (1982-11-01), Kilichowski et al.

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