Method for producing via contacts in a semiconductor device

Details Method for producing via contacts in a semiconductor device Method for producing via contacts in a semiconductor device

1995-06-07

1999-10-05

Quach, T. N.

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438647, 438648, 438672, H01L 2128

Patent

active

059638273

ABSTRACT:
To provide a method for producing the semiconductor device in which contactability between a dielectric layer and a contact layer is not reduced during the formation of a metal plug, the method comprises forming a semiconductor device including a base; forming a lower conductive layer on the base; forming a dielectric layer formed on the lower conductive layer; forming an opening in the dielectric layer for electrically connecting the lower conductive layer with an upper conductive layer to be formed on the dielectric layer; forming a first contact layer formed on at least a bottom surface of the via hole and made of a single TiON layer, any portions of said first contact layer formed on the dielectric layer being removed; forming a second contact layer over an entire exposed surface of the first contact layer, depositing tungsten on the second contact layer by a chemical vapor deposition method; and removing portions of the second contact layer formed on the dielectric layer while leaving a tungsten plug and the first and second contact layers within the opening to form a via hole contact.

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