Chemistry: electrical and wave energy – Processes and products
Patent
1983-06-09
1985-01-15
Tufariello, Thomas
Chemistry: electrical and wave energy
Processes and products
204 11, C25D 102, C25D 120
Patent
active
044937539
ABSTRACT:
A separating nozzle element composed of a separating body and two cover plates between which the body is interposed, the nozzle element being used for the separation of gaseous or vaporous mixtures, is produced by providing a layer of a material whose ability to be removed from the layer can be altered by irradiation, the thickness of the layer being approximately equal to the thickness of the separating body, irradiating the layer, starting at one surface, with radiation which has a penetration depth into the material of the layer which is less than the thickness of the layer, in a pattern corresponding to the cross section of the separating body structure, and removing from the layer material which is more easily removable as a result of the irradiation, to thereby permit the radiation to penetrate to greater distances from the one surface, while continuing the removal of material until the entire thickness of the layer has been subjected to radiation and removal, to form a mold of the separating body. The mold is then filled with material constituting the separating body, whereafter the mold is removed.
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patent: 4080267 (1978-03-01), Castellani
patent: 4351653 (1982-09-01), Becker et al.
patent: 4422905 (1983-12-01), Becker et al.
Plating, Jul. 1965, pp. 673-676.
Moran et al., "High Resolution, Steep Profile Resist Patterns", J. Vac. Sci. Technol., vol. 16, No. 6, Nov., Dec., 1979, (pp. 1620-1624).
Becker et al., "Uranium Enrichment by the Separation-Nozzle Process", Naturwissenschaften (Natural Sciences), 63, pp. 407-411 (1976).
Bowden et al., "Resist Materials for Fine Line Lithography", Solid State Technology, May, 1979, pp. 72-82.
E. Bartholome et al., "Die Chemische Fabrik", vol. 39, 1967, p. 4, Chemie Ingenieur Technik.
Becker Erwin
Betz Hans
Ehrfeld Wolfgang
Heuberger Anton
Munchmeyer Dietrich
Kernforschungszentrum Karlsruhe GmbH
Tufariello Thomas
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