Method for producing positive photoresist image utilizing diazo

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430275, 430277, 430278, 430326, 430327, 430330, 430331, 430967, G03F 732, G03F 738, G03F 740

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053488423

ABSTRACT:
A photosensitizer comprising a diazo ester of benzolactone ring compound, such as phenolphthalein or cresolphthalein as the backbone, where at least one of the hydroxy groups on benzolactone ring has been esterified with diazo-sulfonyl chloride consisting of 60 to 100 mole % 2,1,4 or 2,1,5-diazo sulfonyl chloride or a mixture thereof, and a photoresist comprising an admixture of the photosensitizer, which is present in the photoresist composition in an amount sufficient to uniformly photosensitize the photoresist composition; a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition and a suitable solvent.

REFERENCES:
patent: 4701399 (1987-10-01), Nagano et al.
patent: 4721665 (1988-01-01), Dooley et al.
patent: 4772534 (1988-09-01), Kawamura et al.
patent: 4818658 (1989-04-01), Martin et al.
patent: 4985333 (1991-01-01), Tokutake et al.
patent: 5064741 (1991-11-01), Koike et al.
patent: 5116715 (1992-05-01), Roland et al.
Patent Abstracts of Japan, vol. 11, No. 093 (P-559) Mar. 24, 1987 & JP,A,61 245 154 (Dainippon Ink & Chem. Inc.) Oct. 31, 1985 (see abstract).

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