Method for producing patterns in a polymer layer

Details Method for producing patterns in a polymer layer Method for producing patterns in a polymer layer

2008-04-30

2010-12-07

Chen, Bret (Department: 1715)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S577000, C427S578000, C427S579000, C427S588000

Reexamination Certificate

active

07846512

ABSTRACT:
A method for producing patterns in a polymer layer. Polymer sites are formed on a support. These sites are subjected to a plasma deposition of dielectric material and preferably react with this plasma so as to form openings at the level of said sites. A pattern structure is then formed in the dielectric material and/or in the polymer.

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