Method for producing ink jet recording head

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Post imaging radiant energy exposure

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430320, 430324, 430325, G03C 500

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052906671

ABSTRACT:
In the preparation of a ink jet recording head by coating positive photoresist containing naphthoquinone diazide on a substrate, patterning the positive photoresist, then coating a photocurable material for liquid path formation, photocuring said material and dissolving the patterned photoresist thereby forming liquid paths, the patterned positive photoresist is subjected to flush exposure and degassing prior to the coating of the liquid path forming material in order to discharge the bubbles from the photoresist and to prevent eventual deformation of said material by the migrating bubbles generated from the positive photoresist.

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Solid State Technology, Onodera et al., "Outgas Free Photoresist Processing", vol. 34, No. 2, pp. S7-S10, Feb. 1991.
Design Engineering, "Mini gears show their mettle", p. 24, Jun. 1991.

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