Method for producing improved cerium oxide abrasive...

Details Method for producing improved cerium oxide abrasive... Method for producing improved cerium oxide abrasive...

2005-02-03

2008-09-30

Vanoy, Timothy C (Department: 1793)

Chemistry of inorganic compounds

Rare earth compound

C106S003000, C451S028000, C438S692000, C438S693000, C051S309000

Reexamination Certificate

active

07429367

ABSTRACT:
Provided are methods for manufacturing improved cerium oxide abrasives suitable for forming slurry compositions suitable for CMP processes. The cerium oxide abrasives are produced by the heat treatment of a mixture of a cerium precursor compound under conditions that produce primary cerium oxide particles that are incorporated in larger secondary abrasive particles. The structure of the primary cerium oxide particles and/or the presence of incompletely oxidized cerium within the secondary abrasive particle tend to reduce its mechanical strength, thereby reducing the likelihood of damaging a substrate surface during a CMP process utilizing such abrasives.

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Korean Office Action dated Dec. 13, 2005 and English translation.

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