Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Patent
1996-01-25
1999-05-18
Bowers, Charles
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
438770, 438981, H01C21/84
Patent
active
059045140
ABSTRACT:
A first pair electrodes consisting of an anode to which a plurality of wiring lines to be anodized are connected and a cathode that is opposed to the anode, and a second pair electrodes for collecting impurities in a forming solution are immersed in a forming solution. A voltage is applied to the plurality of wiring lines in such a manner that at least one of the plurality of wiring lines receives the voltage for a different period than the other wiring lines.
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Hiroki Masaaki
Konuma Toshimitsu
Koyama Jun
Yamazaki Shunpei
Berry Renee'R.
Bowers Charles
Robinson Eric J.
Semiconductor Energy Laboratory Co,. Ltd.
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