Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1993-05-07
1996-10-15
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427571, 427580, 427249, 427122, 423446, 118723DC, 118723E, B05D 306, H05H 134
Patent
active
055652492
ABSTRACT:
A process for gas phase synthesis of diamond using a DC plasma jet where a plasma jet generated by DC arc discharge using a DC plasma torch is made to strike a substrate and grow diamond on the substrate, wherein use is made of a plurality of plasma torch anodes, these are arranged coaxially in a telescoped structure, a magnetic field is applied to these in accordance with need to cause the arc to rotate or the electrode is rotated so as to perform gas phase synthesis of diamond.
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Ohtake et al., "Diamond Film Preparation by Arc Discharge Plasma Jet Chemical Vapor Deposition in the Methane Atmosphere", J. Electrochem. Soc., vol. 137, No. 2, Feb. 1990.
Itani Tsukasa
Kawarada Motonobu
Kurihara Kazuaki
Sasaki Ken-ichi
Fujitsu Limited
King Roy V.
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