Method for producing an InSb thin film

Details Method for producing an InSb thin film Method for producing an InSb thin film

1975-08-11

1978-03-21

Pianalto, Bernard D.

Coating processes

Magnetic base or coating

Magnetic coating

427128, 427131, H01F 1002

Patent

active

040804780

ABSTRACT:
A method for producing a unique InSb thin film element which comprises the steps of forming a thin film of InSb polycrystal on a substrate of insulating material, forming an oxide film on the InSb thin film, zone-melting the InSb thin film by heating the thin film covered with the oxide film to a temperature above the melting point of InSb in a controlled gaseous heat-treating atmosphere comprising an inert gas containing from 1 ppm to 3 .times. 10.sup.4 ppm of oxygen, which is replaceable by an addition of a tenfold amount of aqueous vapor to the extent of 10.sup.2 ppm of oxygen, and cooling the resultant element. An InSb thin film element produced in this way is suitable as a material for a magnetosensitive element of good performance, especially a low noise level or a high S/N ratio.

REFERENCES:
patent: 3341358 (1967-09-01), Clawson et al.
patent: 3454433 (1969-07-01), Mueller
patent: 3642533 (1972-02-01), Ahn et al.

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