Method for producing a vertical field effect transistor

Details Method for producing a vertical field effect transistor Method for producing a vertical field effect transistor

2008-06-20

2010-06-29

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257SE29262

Reexamination Certificate

active

07745875

ABSTRACT:
A method for producing a field effect transistor, in which a plurality of layers are in each case deposited, planarized and etched back, in particular a gate electrode layer, is disclosed. This method allows the manufacturing of transistors having outstanding electrical properties and having outstanding reproducibility.

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