Method for producing a semiconductor device

Details Method for producing a semiconductor device Method for producing a semiconductor device

1981-12-08

1986-01-14

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG73, C30B 3300

Patent

active

045644160

ABSTRACT:
A method of producing a semiconductor device comprising a semiconductor substrate exhibiting defect density of 10.sup.5 /cm.sup.2 or more when the central portion of the substrate is observed through an optical microscope after the substrate is heat-treated at 1,050.degree. C. for 18 hours and etched along a section thereof across the thickness thereof.

REFERENCES:
patent: 3441385 (1969-04-01), Schmidt
patent: 3976512 (1976-08-01), De Nora et al.
patent: 3997368 (1976-12-01), Petroff et al.
patent: 4018626 (1977-04-01), Schwuttke et al.
patent: 4069068 (1978-01-01), Beyer et al.
patent: 4116719 (1978-09-01), Shimizu et al.
patent: 4314595 (1982-02-01), Yamamoto
Cazcarra et al., J. Appl. Phys., 51(8), 8/80, pp. 4206-4211.
Fuller et al., Jl. of Applied Physics, vol. 28, No. 12, 12/57.
ANSI/ASTM F 121-79, 1979, pp. 519-521.
Katz et al., J. Electrochem. Soc. Solid State Science and Technology, vol. 125, No. 7, 7/78, pp. 1151-1155.
Tan et al., Applied Physics Letters, vol. 30, No. 4, Feb. 15, 1977, pp. 175-176.
Freeland et al., Applied Physics Letters, vol. 30, No. 1, Jan. 1, 1977, pp. 31-33.

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