Method for producing a laminated thin film capacitor

Details Method for producing a laminated thin film capacitor Method for producing a laminated thin film capacitor

1995-06-05

1997-09-02

Nguyen, Tuan H.

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

438 3, 438240, 438 79, H01L 2170

Patent

active

056630891

ABSTRACT:
A laminated thin film capacitor having a substrate, at least two electrode layers, at least one dielectric layer and a pair of external electrode which are placed on respective side walls of the capacitor, wherein the metal electrode layer and the dielectric layers are laminated alternately on the substrate, and every other metal electrode layers are exposed on each of side walls of the capacitor, which capacitor is excellent in dielectric properties such as a high capacity per unit volume.

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