Method for processing a MEMS/CMOS cantilever based memory...

Details Method for processing a MEMS/CMOS cantilever based memory... Method for processing a MEMS/CMOS cantilever based memory...

2008-04-08

2008-04-08

Nguyen, Cuong (Department: 2811)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S050000

Reexamination Certificate

active

11168195

ABSTRACT:
A method is disclosed. The method includes fabricating microelectromechanical (MEMS) structures of a Seek and Scan Probe (SSP) memory device on a first wafer, and fabricating CMOS and memory medium components of the SSP memory device on a second wafer.

REFERENCES:
patent: 5546375 (1996-08-01), Shimada et al.
patent: 5970315 (1999-10-01), Carley et al.
patent: 6835589 (2004-12-01), Pogge et al.
patent: 2004/0150472 (2004-08-01), Rust

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