Electricity: electrical systems and devices – Discharging or preventing accumulation of electric charge
Patent
1997-10-27
1999-12-07
Fleming, Fritz
Electricity: electrical systems and devices
Discharging or preventing accumulation of electric charge
361270, H05F 0100
Patent
active
059993979
ABSTRACT:
The present invention discloses a method for preventing electrostatic discharge damages to an article that is made of an insulating material and stored in a container also made of an insulating material by maintaining a minimum safe distance between the article and the top lid of the container such that a saturation electric field cannot be reached at such safety distance and thus electrostatic discharge does not occur. The present invention novel method can be utilized in carrying any insulating articles but is particularly suitable for carrying a quartz reticle in a polycarbonate pod.
REFERENCES:
patent: 4327832 (1982-05-01), De Matteo
patent: 4463851 (1984-08-01), Cecil
patent: 4702371 (1987-10-01), Hoshi et al.
patent: 5150786 (1992-09-01), McAllister
Chao Ying-Chen
Chen Ming-Fa
Chen Shih-Shiung
Fleming Fritz
Taiwan Semiconductor Manufacturing Company , Ltd.
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