Method for preventing charging effect and thermal damage in char

Details Method for preventing charging effect and thermal damage in char Method for preventing charging effect and thermal damage in char

1997-01-27

1998-05-05

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 324751, 382147, H01J 3726

Patent

active

057478031

ABSTRACT:
A method is provided for inspecting an integrated circuit chip by use of a charged-particle microscope, such as an electron or ion-beam microscope, without incurring charge effect and thermal damage to the chip. Fundamentally, the method features the forming of a coating of good electrical and heat conductive material on the back of the target portion such that the charged particles from the microscope, after passing through the target portion, will encounter the coating of good electrical and heat conductive material and thus be drawn away by the same. As a result of this, the adverse consequences of charge effect and thermal damage can be prevented. This also allows for an increase in the resolution of the resultant image of the inspected chip.

REFERENCES:
patent: 5369274 (1994-11-01), Brunger

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