Method for preparing optically flat damage-free surfaces

Details Method for preparing optically flat damage-free surfaces Method for preparing optically flat damage-free surfaces

1980-04-24

1982-04-06

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156345, 156662, 252 791, H01L 21306

Patent

active

043234224

ABSTRACT:
A method and apparatus for polishing surfaces so as to provide surfaces which are optically flat and damage free. An etch solution is applied to a rotating surface and the surface to be prepared is caused by hydroplane on the etch solution, the hydroplaning action producing the desired optically flat surface.

REFERENCES:
patent: 3073764 (1963-01-01), Sullivan
patent: 3156596 (1964-11-01), Sullivan
patent: 3342652 (1967-09-01), Reisman et al.
patent: 3437543 (1969-04-01), Winingg
patent: 3629023 (1971-12-01), Stehlow

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