Method for preparing mask and wafer data files

Details Method for preparing mask and wafer data files Method for preparing mask and wafer data files

2007-01-23

2008-10-28

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S086000, C700S097000, C700S117000, C716S030000, C250S492300, C707S793000

Reexamination Certificate

active

07444199

ABSTRACT:
A method for converting a data file into a writer file for a mask writer is provided. A plurality of sub-files is created from the data file. The plurality of sub-files is transferred to the mask writer. A plurality of writer files is created from the plurality of sub-files at the mask writer. The transferring the plurality of sub-files to the mask writer, creating a plurality of writer files from the plurality of sub-files at the mask writer, and checking the plurality of transferred sub-files at the mask writer are executed in parallel in a single process.

REFERENCES:
patent: 6056785 (2000-05-01), Chisaka
patent: 6703170 (2004-03-01), Pindo
patent: 2002/0059317 (2002-05-01), Black et al.
patent: 2004/0107412 (2004-06-01), Pack et al.
patent: 2005/0091632 (2005-04-01), Pierrat et al.

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