Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2006-03-16
2008-05-20
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S442110, C250S306000, C250S309000, C250S311000
Reexamination Certificate
active
07375325
ABSTRACT:
In a method for preparing a sample for electron microscopic examinations, in particular with a transmission electron microscope (TEM),a) a substrate containing the sample to be prepared on a sample locus is provided in a vacuum chamber,b) a protective layer is applied onto a surface of the sample locus,c) the sample located under the protective layer is separated from the substrate by an ion beam, the protective layer acting as a mask, andd) in the vacuum chamber, the separated sample is removed from the substrate.
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Burkhardt Claus
Nisch Wilfried
Berman Jack I.
Carl Zeiss NTS GmbH
Logie Michael J
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