Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1993-08-27
1995-08-08
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250311, 25049221, 20419234, 20429836, H01J 3726
Patent
active
054401232
ABSTRACT:
A method for processing sample material for use with transmission electron microscopes utilizes a sheet mesh for supporting the sample material during irradiation processing. The sheet mesh is formed of a metallic sheet material having a single opening provided in a central portion thereof, a circumferential edge portion of the opening is tapered from one side of the sheet mesh through to the other and the ankle of the taper corresponds to the ankle of irradiation. Position determining portions are provided on the sheet mesh to assure reliable positioning of the sample material. Also, the method provides a for preparation of the sample material including a protective layer formed over a membrane layer for allowing adhesion of membrane layers made of materials which would otherwise degrade the adhesion layer during processing.
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Berman Jack I.
Beyer James
Kananen Ronald P.
Sony Corporation
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