Method for placing metal contacts underneath FBAR resonators

Details Method for placing metal contacts underneath FBAR resonators Method for placing metal contacts underneath FBAR resonators

2007-01-09

2007-01-09

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S365000

Reexamination Certificate

active

11174364

ABSTRACT:
A device includes a device substrate defining a pit in a topside of the device substrate, a film bulk-wave acoustic resonator (FBAR) mounted over the pit on the device substrate, a first contact pad on a backside of the device substrate that is coupled to a bottom electrode of the FBAR, and a second contact pad on the backside of the device substrate that is coupled to a top electrode of the FBAR.

REFERENCES:
patent: 6777263 (2004-08-01), Gan et al.
patent: 6818464 (2004-11-01), Heschel
patent: 6836013 (2004-12-01), Geefay
patent: 6903012 (2005-06-01), Geefay et al.
patent: 2005/0218488 (2005-10-01), Matsuo

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