Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1985-12-23
1987-06-02
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156650, 156656, 1566611, 156667, 430313, 430318, C23F 102, B44C 122, C03C 1500, C03C 2506
Patent
active
046700978
ABSTRACT:
An optically transparent and electrically conductive film is patterned on a ubstrate, for instance in an electro-optical display device such as an electroluminescent device having a patterned transparent electrode layer, by a process utilizing a double masking structure that provides for more positive delineation of thin film device patterns. In this process, an indium tin oxide layer is formed between a metallic pattern on a glass substrate and a photoresist mask. The indium tin oxide layer has a metal lift-off mask under those areas that are to be removed and a photoresist protective mask over those areas that are to remain. The double masking will also provide greater protection to the electrode areas during the critical etching steps in developing an electroluminescent display.
REFERENCES:
patent: 3979240 (1976-09-01), Ghezzo
patent: 4188095 (1980-02-01), Nishimura et al.
patent: 4336295 (1982-06-01), Smith
Abdalla Mohamed I.
Miller M. Robert
Finnegan Martha Ann
GTE Products Corporation
Jimenez Jose W.
Powell William A.
The United States of America as represented by the Secretary of
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