Method for patterning large scale nano-fibrous surfaces...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Plural fluid growth steps with intervening diverse operation

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C438S500000, C438S507000, C438S758000, C438S800000, C257SE51040, C257SE21090, C977S742000

Reexamination Certificate

active

07491628

ABSTRACT:
A method of assembling large numbers of nanoscale structures in pre-determined ways using fluids or capillary lithography to control the patterning and arrangement of the individual nanoscale objects and nanostructures formed in accordance with the inventive method are provided. In summary, the current method uses the controlled dispersion and evaporation of fluids to form controlled patterns of nanoscale objects or features anchored on a substrate, such as nanoscale fibers like carbon nanotubes.

REFERENCES:
patent: 3955015 (1976-05-01), Ohtsuka et al.
patent: 4104204 (1978-08-01), Williams
patent: 4173474 (1979-11-01), Tanaka et al.
patent: 4173475 (1979-11-01), Chandross et al.
patent: 4260725 (1981-04-01), Keogh et al.
patent: 4330383 (1982-05-01), Ellis et al.
patent: 4575373 (1986-03-01), Johnson
patent: 4617350 (1986-10-01), Maeda et al.
patent: 4685921 (1987-08-01), Peyman
patent: 4787903 (1988-11-01), Grendahl
patent: 4790847 (1988-12-01), Woods
patent: 4816031 (1989-03-01), Pfoff
patent: 4846172 (1989-07-01), Berlin
patent: 4921589 (1990-05-01), Yates et al.
patent: 4942112 (1990-07-01), Monroe et al.
patent: 5066301 (1991-11-01), Wiley
patent: 5110339 (1992-05-01), Ciriello et al.
patent: 5141678 (1992-08-01), Blum
patent: 5171266 (1992-12-01), Wiley et al.
patent: 5173381 (1992-12-01), Natansohn et al.
patent: 5213825 (1993-05-01), Shimizu et al.
patent: 5258024 (1993-11-01), Chavel et al.
patent: 5288293 (1994-02-01), O'Donnell, Jr.
patent: 5296305 (1994-03-01), Baude et al.
patent: 5443506 (1995-08-01), Garabet
patent: 5443955 (1995-08-01), Cornell et al.
patent: 5470662 (1995-11-01), Weber et al.
patent: 5480428 (1996-01-01), Fedorov et al.
patent: 5529861 (1996-06-01), Redfield
patent: 5623002 (1997-04-01), Nomura et al.
patent: 5684636 (1997-11-01), Chow et al.
patent: 5702846 (1997-12-01), Sato et al.
patent: 5725575 (1998-03-01), O'Donnell, Jr.
patent: 5728155 (1998-03-01), Anello et al.
patent: 5728156 (1998-03-01), Gupta et al.
patent: 5744267 (1998-04-01), Meerholz et al.
patent: 5762836 (1998-06-01), Bos et al.
patent: 5807906 (1998-09-01), Bonvallot et al.
patent: 5837115 (1998-11-01), Austin et al.
patent: 5858585 (1999-01-01), Haarer et al.
patent: 5892601 (1999-04-01), Curtis et al.
patent: 5920536 (1999-07-01), Campbell et al.
patent: 5943145 (1999-08-01), Curtis et al.
patent: 5948470 (1999-09-01), Harrison et al.
patent: 5964802 (1999-10-01), Anello et al.
patent: 5984962 (1999-11-01), Anello et al.
patent: 5995251 (1999-11-01), Hesselink et al.
patent: 5998096 (1999-12-01), Umemoto et al.
patent: 6027623 (2000-02-01), Ohkawa
patent: 6046290 (2000-04-01), Berneth et al.
patent: 6146227 (2000-11-01), Mancevski
patent: 6154432 (2000-11-01), Faruqi et al.
patent: 6232706 (2001-05-01), Dai et al.
patent: 6235675 (2001-05-01), McIlroy
patent: 6271281 (2001-08-01), Liao et al.
patent: 6278231 (2001-08-01), Iwasaki et al.
patent: 6346189 (2002-02-01), Dai et al.
patent: 6361861 (2002-03-01), Gao et al.
patent: 6383923 (2002-05-01), Brown et al.
patent: 6399406 (2002-06-01), Chan et al.
patent: 6401526 (2002-06-01), Dai et al.
patent: 6440761 (2002-08-01), Choi
patent: 6517995 (2003-02-01), Jacobson et al.
patent: 6685810 (2004-02-01), Noca et al.
patent: 6766817 (2004-07-01), da Silva
patent: 2001/0021534 (2001-09-01), Wohlstadter et al.
patent: 2001/0051367 (2001-12-01), Kiang
patent: 2003/0052006 (2003-03-01), Noca et al.
patent: 2004/0166235 (2004-08-01), Fujii et al.
patent: 2006/0073089 (2006-04-01), Ajayan et al.
patent: 3605512 (1986-08-01), None
patent: 0472384 (1992-02-01), None
patent: 0689067 (1995-12-01), None
patent: 60175009 (1985-09-01), None
patent: 01120740 (1989-05-01), None
patent: 05-096553 (1993-04-01), None
patent: 07281426 (1995-10-01), None
patent: 08101499 (1996-04-01), None
patent: 08101502 (1996-04-01), None
patent: 08101503 (1996-04-01), None
patent: WO 93/21245 (1993-10-01), None
patent: WO 95/17460 (1995-06-01), None
patent: WO 98/05272 (1998-02-01), None
patent: WO 98/27863 (1998-07-01), None
patent: WO 99/26112 (1999-05-01), None
patent: WO 00/41650 (2000-07-01), None
patent: WO 01/21061 (2001-03-01), None
patent: WO 01/71411 (2001-09-01), None
patent: WO 01/86647 (2001-11-01), None
patent: WO 02/093738 (2002-11-01), None
U. Kim et al, “Synthesis of High-Density Carbon Nanotube Films by Microwave Plasma Chemical Vapor Deposition”, Diamond and Related Material.vol. 10, issue 11, Nov. 2001. pp. 1947-1951.
Chakrapani et al. “Cappillarity-Driven Assembly of Two-Dimensional Cellular Carbon Nanotube Foams”. Mar. 3, 2004, PNAS vol. 101, No. 12, pp. 4009-4012.
Bower, Chris. “Plasma Induced Alignment of Carbon Nanotubes”. 2000 Applied Physics Letters. vol. 77, No. 6. Aug. 7, 2000.
Dujardin et al, “Capillarity and Wetting of Carbon Nanotubes”, Sep. 23, 1994, Science vol. 265, pp. 1850-1851.
Avrutsky et al., “Multiwavelength Diffraction and Apodization Using Binary Superimposed Gratings”, IEEE Photonics Technology Letters, Jun. 1998, vol. 10, No. 6, pp. 839-841.
Baughman et al., “Carbon Nanotube Actuators”, Science, May 21, 1999, vol 284, pp. 1340-1344.
Boul et al., “Reversible Sidewall Functionalization of Buckytubes”, Chemical Physics Letters, Sep. 3, 1999, vol. 310, pp. 367-372.
Chen et al., “Plasma-Induced Low-Temperature Growth of Graphic Nanofibers on Nickel Susbstrates”, Journal of Crystal Growth, 1998, vol. 193, pp. 342-346.
Choi et al., “Growth of Carbon Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition at Low Temperature”, J. Vac. Sci. Technol., Jul./Aug. 2000, vol. 18, No. 4, pp. 1864-1868.
Chou et al., “A Microfabricated Device for Sizing and Sorting DNA Molecules”, Proc. Natl. Acad. Sci. USA, Jan. 1999, vol. 96, pp. 11-13.
Dial et al., “Fabrication of High-Density Nanostructures by Electron Beam Lithography”, J. Vac. Sci. Technol. B, Nov./Dec. 1998, vol. 16, No. 6, pp. 3887-3890.
Drmanac et al., “Sequencing by Hybridization”, Chapter 4 from Automated DNA Sequencing and Analysis, Academic Press,1994, pp. 29-36, title page, copyright page.
Duke et al., “Pulsed-Field Electrophoresis in Microlithographic Arrays”, Electrophoresis, 1996, vol. 17, pp. 1075-1079.
Duke et al., “Sequencing in Nanofabricated Arrays: A Feasibility Study”, Electrophoresis, 1997, vol. 18, pp. 17-22.
Fan et al., “Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties”, Science, Jan. 22, 1999, vol. 283, pp. 512-514.
Hadd et al., “Sub-Microliter DNA Sequencing for Capillary Array Electrophoresis”, Journal of Chromatography A, 2000, vol. 894, pp. 191-201.
Hafner et al., “Direct Growth of Single-Walled Carbon Nanotube Scanning Probe Microscopy Tips”, J. Am. Chem. Soc., 1999, vol. 121, pp. 9750-9751.
Hafner et al., “Catalytic Growth of Single-Wall Carbon Nanotubes From Metal Particles”, Chemical Physics Letters, Oct. 30, 1998, vol. 296, pp. 195-202.
Han et al., “Entropic Trapping and Escape of Long DNA Molecules at Submicron Size Constriction”, Physical Review Letters, Aug. 23, 1999, vol. 83, No. 8, pp. 1688-1691.
Han et al, “Observation and Modeling of Single-Wall Carbon Nanotube Bend Junctions”, Physical Review B, Jun. 15, 1998, vol. 57, No. 23, pp. 983-989.
Han et al., “Synthesis of Carbon Nanotube Bridges on Patterned Silicon Wafers by Selective Lateral Growth”, Journal of Applied Physics, Dec. 1, 2001, vol. 90, No. 11, pp. 5731-5734.
Harrison et al., “Lithography With a Mask of Block Copolymer Microstructures,” J. Vac. Sci. Technol. B, Mar./Apr. 1998, vol. 16, No. 2, pp. 544-552.
Hoppe et al., “Arrays of Carbon Nanotubes as RF Filters in Waveguides,” May 9, 2003, website http://www.nasatech.com/Briefs/Apr03/NPO30207.html, 2 pgs.
Li et al., “Highly-Ordered Carbon Nanotube Arrays for Electronics Applications,” Applied Physics Letters, Jul. 19, 1999, vol. 75, No. 3, pp. 367-369.
Hu

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for patterning large scale nano-fibrous surfaces... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for patterning large scale nano-fibrous surfaces..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for patterning large scale nano-fibrous surfaces... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4063040

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.