Method for parallel fabrication of nanometer scale multi-device

Details Method for parallel fabrication of nanometer scale multi-device Method for parallel fabrication of nanometer scale multi-device

1987-12-23

1989-02-07

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156633, 156643, 156644, 156656, 1566591, 427 431, 427282, 427307, B44C 122, B05D 306, G03C 1500, G03C 500

Patent

active

048029513

ABSTRACT:
Articles exhibiting fabricated structures with nanometer size scale features (nanostructures), typically a device comprising nanostructures of a functional material on or in a substrate of dissimilar material, are produced by a method employing a substrate base or coating and a thin layer serving as a lithographic mask or template, consisting of a self-assembled ordered material array, typically a periodic array of molecules such as undenatured proteins, exhibiting holes, thickness or density variations. It is possible to produce complex structures containing large numbers of nanometers scale elements through a small number of simple steps.

REFERENCES:
patent: 4103064 (1978-07-01), McAlear et al.
patent: 4103073 (1978-07-01), McAlear et al.
patent: 4496419 (1985-01-01), Nulman et al.
patent: 4659429 (1987-04-01), Isaacson et al.

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