Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate
2007-11-27
2007-11-27
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Transparent or translucent material
C355S077000
Reexamination Certificate
active
11187730
ABSTRACT:
In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.
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Geh Bernd
Gräupner Paul
Stammler Thomas
Stenkamp Dirk
Stühler Jochen
Carl Zeiss SMT AG
Factor & Lake, Ltd.
Toatley , Jr. Gregory J.
Valentin, II Juan D.
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