Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2007-10-24
2010-10-12
Kasenge, Charles R (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C414S222020, C414S222040, C414S936000
Reexamination Certificate
active
07813832
ABSTRACT:
A method and apparatus for positioning a substrate in a substrate processing chamber. The method includes placing the substrate on a substrate transfer blade, moving the substrate transfer blade to a first position located in a transfer chamber, and capturing at least one image that includes at least a portion of the substrate transfer blade and at least a portion of the substrate. The method also includes processing the image to determine a position of a predetermined portion of the substrate transfer blade and a position of predetermined portion of the substrate. The method further includes determining an offset between the position of the predetermined portion of the substrate transfer blade and the position of the predetermined portion of the substrate, and moving the substrate transfer blade to a second position located in the substrate processing chamber, wherein the second position is adjusted to account for the offset.
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Applied Materials Inc.
Kasenge Charles R
Townsend and Townsend and Crew
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