Method for obtaining images from slices of specimen

Details Method for obtaining images from slices of specimen Method for obtaining images from slices of specimen

2011-07-12

2011-07-12

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S309000, C250S311000

Reexamination Certificate

active

07977631

ABSTRACT:
The invention relates to a method for obtaining images from slices of a specimen, the method comprising:repeatedly obtaining an image of the surface layer of the specimen (1) and removing the surface layer of the specimen, thereby bringing the next slice to the surface;characterized in that after at least one of the removals of a surface layer the specimen is exposed to a staining agent.This method is especially suited for use in a particle-optical instrument equipped with both a scanning electron microscope column (20) and a focused ion beam column (10).The specimen can e.g. be stained in situ by admitting a gas, such as OsO4(osmiumtetroxide), to the specimen. This method also makes it possible to perform differential staining by first making an image of the specimen exposed to a first staining agent, and subsequently making an image of the specimen when it is additionally stained by a second staining agent.

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