Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1998-08-03
1999-12-21
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
H01J 3726
Patent
active
060052481
ABSTRACT:
A region on a surface side of a sample is irradiated with a Ga ion beam to form a first laminar portion having a thickness of 50-200 nm small enough to allow the transmission electron microscopic observation. While the sample is being heated within a transmission electron microscope, a process in which silicide is being formed is observed at the first laminar portion. Thereafter, a second laminar portion is formed in a thick region of the sample, similarly to the first laminar portion. Then, the first and second laminar portions are comparatively observed in a non-heated state with the transmission electron microscope. If observation results of the two laminar portions in the non-heated state are the same, a result of observing the first laminar portion during the heating is taken to represent a phenomenon in a bulk state. If observation results of the two laminar portions are different from each other, the result of observing the first laminar portion during the heating is taken to represent a unique phenomenon resulting from the heating of the sample in a thin film state. Thus, a transmission electron microscopic observation involving the simultaneous heat treatment is correctly carried out with a few samples.
REFERENCES:
patent: 5278408 (1994-01-01), Kakibayashi et al.
"Denshi Kenbikyo Giho (Electron Microscopy), edited by Electron Microscopy Society of Japan, Kanto Branch, published by Asakura Shoten, 1991, pp. 119-130".
Patent Abstracts of Japan vol. 016, No. 264 (P-1370), Jun. 15, 1992 & JP 04 066840 A (Nippon Telegr & Teleph Corp), Mar. 3, 1992.
Patent Abstracts of Japan vol. 098, No. 010, Aug. 31, 1998 & JP 10 123030 A (Sharp Corp), May 15, 1998.
Patent Abstracts of Japan vol. 012, No. 161 (P-702), May 17, 1998 & JP 62 274237 A (Fujitsu Ltd), Nov. 28, 1987.
Mori Kayoko
Nakano Akihiko
Yasuo Fumitoshi
Nguyen Kiet T.
Sharp Kabushiki Kaisha
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