Method for non-destructive trench depth measurement using...

Details Method for non-destructive trench depth measurement using... Method for non-destructive trench depth measurement using...

2007-03-06

2007-03-06

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S492200

Reexamination Certificate

active

11035932

ABSTRACT:
A method (and system) for non-destructive measurement of a depth of a feature in a structure, includes using a scanning electron microscope (SEM) image to navigate to find the feature in an X-ray image, using an electron beam to produce a fluorescent emission in the feature, and using an X-ray count made at a position of the feature in the X-ray image, to determine a depth of the feature.

REFERENCES:
patent: 6388756 (2002-05-01), Ho et al.
patent: 6834117 (2004-12-01), Rao et al.

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