Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1994-11-07
1996-06-18
Wieder, Kenneth A.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324663, G01R 2726
Patent
active
055281532
ABSTRACT:
A method for measurement of dielectric constant of a thin film is disclosed which is non-destructive and avoids contact with the film and the substrate carrying it. A first characteristic of the substrate is measured using a capacitance measuring device. Then, the thin film is deposited on the substrate. The first characteristic of the substrate is measured a second time after the film has been deposited. Thereafter, the true film thickness is measured. A ratio of the measurements made with the capacitance measuring device is then established with the actual thickness measurement. The dielectric constant can then be derived from a lookup table or graph calibrated for the tools being used for the measurements.
REFERENCES:
patent: 3801900 (1974-04-01), Szasz
patent: 4910453 (1990-03-01), Abbe et al.
Hsu Wei-Yung
Taylor Kelly J.
Brown Glenn W.
Crane John D.
Donaldson Richard L.
Kesterson James C.
Texas Instruments Incorporated
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