Method for non-contact xyz position sensing

Details Method for non-contact xyz position sensing Method for non-contact xyz position sensing

1986-03-03

1988-02-09

Howell, Janice A.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250340, 2503581, 2503601, G01B 1114

Patent

active

047243228

ABSTRACT:
A method for detecting and precisely locating features such as susceptor surfaces, wafers and surface depressions and elevations, is disclosed. A modified high angle, infrared, crossed-optics-pair sensor unit is used, as well as both perpendicular and parallel scanning.

REFERENCES:
patent: 3206603 (1965-09-01), Mauro

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