Method for monitoring metal corrosion on integrated circuit wafe

Details Method for monitoring metal corrosion on integrated circuit wafe Method for monitoring metal corrosion on integrated circuit wafe

1996-10-16

1999-02-23

Alexander, Lyle A.

Chemistry: analytical and immunological testing

Process or composition for determination of physical state...

Corrosion resistance or power

436 1, 436 5, G01N 3100

Patent

active

058743090

ABSTRACT:
A method and metal test pattern for monitoring metal corrosion susceptibility for integrated circuit wafers. Test patterns having an array of metal circles to simulate contact regions, an array of metal strips to simulate electrode regions, and a blanket metal layer to simulate bulk metal regions are formed. A first number of defects per unit area for the test patterns is measured, using a defect scan system. The test pattern wafers are then subjected to environmental stress conditions for a first time and a second number of defects per unit area for the test patterns is measured, again using a defect scan system. The difference between the second number and the first number is compared with a critical number. If excessive corrosion occurs the process for producing wafers is corrected before continuing to process product wafers.

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patent: 5389216 (1995-02-01), Balkanli
patent: 5411890 (1995-05-01), Falat
patent: 5481198 (1996-01-01), Patel

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