Method for monitoring etching of resists by monitoring the flour

Details Method for monitoring etching of resists by monitoring the flour Method for monitoring etching of resists by monitoring the flour

1983-05-06

1984-11-13

Massie, Jerome

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156652, 156654, 156668, 156904, H01L 21306

Patent

active

044824246

ABSTRACT:
A method for lithographically fabricating devices is disclosed. In accordance with the method, a sacrificial coating material (SCM), e.g., a resist, mixed with a fluorescent material is deposited onto a substrate and then etched. SCM etching is monitored by subjecting the fluorescent material within the SCM to fluorescence-inducing energy, and detecting the resulting fluorescence. Because the fluorescent material is etched away as the SCM is etched, fluorescence intensity decreases as SCM thickness is reduced. Thus, SCM etch end point is accurately determined because etch end point corresponds to the point in time when the detected fluorescence ceases.

REFERENCES:
patent: 4244799 (1981-01-01), Fraser et al.
patent: 4246060 (1981-01-01), Keller
patent: 4377436 (1983-03-01), Donnelly et al.
patent: 4394237 (1983-07-01), Donnelly et al.
patent: 4415402 (1983-11-01), Wang et al.

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