Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1978-08-21
1979-11-27
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156657, 156662, 204192E, 252 791, H01L 21306
Patent
active
041760042
ABSTRACT:
A method for etching semiconductor fusions to change their electrical characteristic, especially to reduce the firing current of thyristor fusions, to a predetermined desired value is disclosed.
The etching is accomplished by subjecting fusions comprised of a body of semiconductor material, for example, silicon, including an anode emitter region therein and an anode electrode affixed thereto, an anode base region, a cathode base region and a gate electrode affixed thereto, and a cathode emitter region having a cathode electrode affixed thereto, to a plasma etchant comprising a mixture of CF.sub.4 and a carrier gas such for example, nitrogen, for a predetermined time interval. Following this etching cycle the firing current of the fusions is measured. Any fusions having a firing current in excess of the desired value at the end of the first etching cycle are subjected to another etching cycle to further reduce the firing current. The etching and measurement cycle is repeated for a predetermined number of cycles. Any fusions having a firing current in excess of the desired value after the predetermined number of etch cycles are scraped.
REFERENCES:
patent: 2783197 (1957-02-01), Herbert
patent: 3897286 (1975-07-01), DeCecco et al.
patent: 4007104 (1977-02-01), Summers et al.
Dombrowski Edward
Johnson Joseph E.
Hinson J. B.
Powell William A.
Westinghouse Electric Corp.
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