Method for minimizing peeling at the surface of spin-on glasses

Details Method for minimizing peeling at the surface of spin-on glasses Method for minimizing peeling at the surface of spin-on glasses

1994-09-01

1996-10-22

Kunemund, Robert

Fishing, trapping, and vermin destroying

437231, 437235, 437238, 427535, 427539, 204179, 134 11, 134 12, 1566431, 1566461, H05H 100, H01L 214757, H01L 21469

Patent

active

055676588

ABSTRACT:
A gas discharge through nitrous oxide or nitrogen is used to remove polymeric deposits that form on the surface of a layer of a spin-on glass that was etched in an atmosphere of carbon-fluorine compounds. Removal of the polymeric deposit greatly improves adhesion to the spin-on glass layer of subsequently deposited layers. The removal is accomplished without increasing any tendency of the spin-on glass layer to absorb moisture.

REFERENCES:
patent: 5270259 (1993-12-01), Ito et al.
patent: 5270267 (1993-12-01), Ouellet
patent: 5290399 (1994-03-01), Reinhardt
patent: 5316980 (1994-05-01), Takeshiro
patent: 5366910 (1994-11-01), Ha et al.
patent: 5376590 (1994-12-01), Machida et al.
patent: 5399533 (1995-03-01), Pramanik et al.
patent: 5413963 (1995-05-01), Yen et al.
patent: 5429988 (1995-07-01), Huang et al.

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