Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1994-02-28
1995-08-22
Breneman, R. Bruce
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
H01L 2100
Patent
active
054436842
ABSTRACT:
To provide a method of measuring thin film thicknesses that is a simple, ck method for determining the thickness of layers as thin as 1-2 nm which, although destructive, consumes very little material.
REFERENCES:
patent: 4512847 (1985-04-01), Brunsch et al.
patent: 4652333 (1987-03-01), Carney
patent: 5236864 (1993-08-01), Iga
Casas Luis M.
Eckart Donald W.
Lareau Richard T.
Anderson William H.
Breneman R. Bruce
Goudreau George
The United States of America as represented by the Secretary of
Zelenka Michael
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