Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1988-10-13
1991-12-17
Willis, Davis L.
Optics: measuring and testing
By polarized light examination
Of surface reflection
G01N 2121
Patent
active
050730266
ABSTRACT:
A method for measuring refractive index of a thin film layer formed on the other layer having a known refractive index includes following steps. A step of irradiating P-polarized monochromatic light and S-polarized monochromatic light individually on the thin film layer with a prescribed angle of incidence, a step of determining reflections R.sub.p and R.sub.s for the P-polarized monochromatic light and S-polarized monochromatic light, respectively, by detecting luminous intensity of reflected light from the thin film layer, and a step of specifying the refractive index of the thin film layer by prescribed calculation either using the amount of phase changes produced by the reflection of said P-polarized light and S-polarized light on a boundary surface between the thin film layer and the medium, the phase changes being determined in accordance with the refractive index of the medium and the reflectances R.sub.p and Rs, or using the amount of phase changes of lights during propagation from an upper surface of the thin film layer to a lower surface thereof the phase changes being determined in accordance with the refractive index of the medium and the reflectances R.sub.p and R.sub.s.
REFERENCES:
Wolf, Ed., Progress in Optics II, Abeles, "Method for Determining Optical Parameters of Thin Films", pp. 249-288, North Holland Publ. Co., Amsterdam, 1963.
Ruiz-Urbieta et al., "Methods for Determining Film Thickness and Optical Constants of Films and Substrates", JOSA, vol. 61, No. 3, pp. 351-359, 3/71.
Shklyarevskii et al., "New Method for the Determination of the Thickness and the Refractive Index of Thin Dielectric Films Evaporated on Metal Substrates", Solid State Comm., vol. 9, pp. 1737-1740, 1971.
IEEE Transactions on Microwave Theory and Techniques, vol. MTT-23, Jan. 1975, 176-177.
Koren Matthew W.
Ricoh & Company, Ltd.
Willis Davis L.
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