Measuring and testing – Gas analysis – Detector detail
Reexamination Certificate
2011-05-24
2011-05-24
Williams, Hezron (Department: 2856)
Measuring and testing
Gas analysis
Detector detail
Reexamination Certificate
active
07946153
ABSTRACT:
A gas sensor based on a field effect transistor (“FET”) evaluates both a change in work function of a gas-sensitive layer of the FET and a change in the capacitance of the layer. Thus, two physically independent signals are read from the gas-sensitive layer, each signal representing a sensitivity to a different gas. This reduces the effect of cross-sensitivities; that is, of one gas on the target gas. The underlying physical mechanisms, the first causing a change in the work function in a reaction with gases and the second causing a change in the capacitance of the sensitive layer, are widely different. Because of this, the two parameters demonstrate different gas sensitivities. If the reactions to both gases are known, the effect of the interfering gas on the sensor signal can be compensated for, and with this the concentration of the target gas can be determined.
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Fleischer Maximilian
Lampe Uwe
Meixner Hans
Pohle Roland
Simon Elfriede
Frank Rodney T
Micronas GmbH
Muncy Geissler Olds & Lowe, PLLC
Williams Hezron
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