Method for measuring diffraction patterns from a...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

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C250S310000

Reexamination Certificate

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07601956

ABSTRACT:
A device and method which enable a transmission electron microscope to measure electron diffraction patterns of a sample very precisely are disclosed. The patterns are suitable for structure determination. The electron beam is precessed by means of deflector coils (6) in the transmission electron microscope before the sample (4), in combination with a similar precession of the electron diffraction pattern by means of deflector coils (9) situated after the sample. The electron diffraction pattern is scanned by means of deflector coils (9) situated after the sample.

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Avalov, et al. “Scanning System for High-Energy Electron Diffractometry,”Journal of Applied Crystallography, vol. 32, pp. 1033-1038, 1999.
Vincent, et al. “Double Conical Beam-Rocking System for Measurement of Integrated Electron Diffraction Intensities,”Ultramicroscopy, vol. 53, pp. 271-282, 1994.
International Search Report dated May 13, 2004.

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